Ethylene glycol VLSI for microelectronic, J.T.Baker®
Supplier: Avantor
Synonyms:
Ethane-1,2-diol, 1,2-Dihydroxy ethane, 1,2-Ethanediol, Glycol
5387-05EA
167
EUR
5387-05
5387-03
Ethylene glycol VLSI for microelectronic, J.T.Baker®
Ethylene glycol
Formula:
HOCH₂CH₂OH MW: 62,07 g/mol |
MDL Number:
MFCD00002885 CAS Number: 107-21-1 |
Specification Test Results
For Microelectronic Use |
|
Assay (HOCH₂CH₂OH) (by GC) | ≥99.0 % |
Color (APHA) | ≤10 |
Acidity (µeq/g) | ≤0.8 |
Water (H₂O)(by Karl Fischer titrn) | ≤0.2 % |
Chloride (Cl) | ≤1 ppm |
Arsenic and Antimony (as As) | ≤0.100 ppm |
Trace Impurities - Iron (Fe) | ≤0.2 ppm |
Trace Impurities - Aluminum (Al) | ≤100.0 ppb |
Trace Impurities - Barium (Ba) | ≤100.0 ppb |
Trace Impurities - Boron (B) | ≤50 ppb |
Trace Impurities - Calcium (Ca) | ≤300 ppb |
Trace Impurities - Chromium (Cr) | ≤50 ppb |
Trace Impurities - Copper (Cu) | ≤50 ppb |
Trace Impurities - Gold (Au) | ≤50 ppb |
Trace Impurities - Lead (Pb) | ≤200.0 ppb |
Trace Impurities - Lithium (Li) | ≤100.0 ppb |
Trace Impurities - Magnesium (Mg) | ≤100.0 ppb |
Trace Impurities - Manganese (Mn) | ≤100.0 ppb |
Trace Impurities - Nickel (Ni) | ≤100.0 ppb |
Trace Impurities - Potassium (K) | ≤300.0 ppb |
Trace Impurities - Sodium (Na) | ≤800.0 ppb |
Trace Impurities - Tin (Sn) | ≤100 ppb |
Trace Impurities - Titanium (Ti) | ≤100.0 ppb |
Trace Impurities - Zinc (Zn) | ≤400.0 ppb |
Particle Count - 0.5 µm and greater | ≤130 par/ml |
Particle Count - 1.0 µm and greater | ≤10 par/ml |
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